Chemical solution deposition of PZT/oxide electrode thin film capacities with preferred orientation of Si substrate

著者名

H. Suzuki, Y. Miya, T. Ohno, and M.Fujimoto

論文題目

Chemical solution deposition of PZT/oxide electrode thin film capacities with preferred orientation of Si substrate

雑誌名

Key Eng. Mater.

雑誌 巻・号・項

301, pp.269-272

発行年

2006