Effect of Back-Etching on Electrical Properties of (001)&(100) Oriented PZT(30/70) Thin Films

著者名

T. Ohno, B. Malic, T. Matsuda , N. Wakiya, H. Suzuki and M.Kosec

論文題目

Effect of Back-Etching on Electrical Properties of (001)&(100) Oriented PZT(30/70) Thin Films

雑誌名

Ferroelectrics

雑誌 巻・号・項

370, pp.119-125

発行年

2008