Effect of Back-Etching on Electrical Properties of (111) – oriented PZT Thin Films

著者名

T. Ohno, B. Malic, M.Kosec, N. Wakiya, H. Suzuki and T. Matsuda

論文題目

Effect of Back-Etching on Electrical Properties of (111) – oriented PZT Thin Films

雑誌名

Trans. Mater. Res. Soc. Jpn. 34

雑誌 巻・号・項

pp.113-116

発行年

2009