Effect of Film Thickness on Electrical Properties of Chemical Solution Depostion Derived PZT/LNO/Si

著者名

Y. Sakamaki, M. Fukazawa, N. Wakiya, H. Suzuki, K. Shinozaki, T. Ohno, and M. Kosec

論文題目

Effect of Film Thickness on Electrical Properties of Chemical Solution Depostion Derived PZT/LNO/Si

雑誌名

Jpn. J. Appl. Phys.

雑誌 巻・号・項

46, pp.6925-6928

発行年

2007