Orientation control of SrRuO₃ thin film on a Si substrate by chemical solution deposition for an electrode of lead zirconate titanate thin films

著者名

T. Ohno, K. Fukumitsu, T. Honda, S. Hirai, T. Arai, N. Sakamoto, N. Wakiya, H. Suzuki and T. Matsuda

論文題目

Orientation control of SrRuO₃ thin film on a Si substrate by chemical solution deposition for an electrode of lead zirconate titanate thin films

雑誌名

Mater. Lett.

雑誌 巻・号・項

181 pp.74-77

発行年

2016