Piezoelectric properties of a near strain-free lead zirconate titanate thin films deposited on a Si substrate

著者名

T.Ohno , K.Fukumitsu , T.Honda , A.Sakamoto , S.Tanaka , S.Hirai , T.Matsuda , N.Sakamoto , H.Suzuki

論文題目

Piezoelectric properties of a near strain-free lead zirconate titanate thin films deposited on a Si substrate

雑誌名

Mater.Lett.

雑誌 巻・号・項

239 pp.584-589

発行年

2019