Preparation and Characterization of Alkoxide Derived Lead-Free Piezoelectric Barium Zirconate Titanate Thin Films with Different Compositions

著者名

T. Ohno, K. Uchida, N. Sakamoto, D. S. Fu, N. Wakiya, T. Matsuda, and H. Suzuki

論文題目

Preparation and Characterization of Alkoxide Derived Lead-Free Piezoelectric Barium Zirconate Titanate Thin Films with Different Compositions

雑誌名

Jpn. J. Appl. Phys.

雑誌 巻・号・項

49 09MA11

発行年

2010