Preparation of lanthanum strontium cobalt oxide electrode on a Si wafer for stress engineering of ferroelectric thin films

著者名

T. Ohno, H. Yanagida, H. Suzuki and T. Matsuda

論文題目

Preparation of lanthanum strontium cobalt oxide electrode on a Si wafer for stress engineering of ferroelectric thin films

雑誌名

J. Ceram. Soc. Jpn.

雑誌 巻・号・項

122 63-66

発行年

2014