Stress Engineering of Lead Free Ferroelectric Thin Films

著者名

T. Ohno, K. Fukamachi, N. Skakamoto, D. S. Fu, N. Wakiya, T. Matsuda and H. Suzuki

論文題目

Stress Engineering of Lead Free Ferroelectric Thin Films

雑誌名

47th International Conference on Microelectronics , Devices and Materials with the Workshop on Organic Semiconductors, Technologies and Devices

雑誌 巻・号・項

2011, Sep. 28-30

発行年

2011