Strain Engineering Effects on Electrical Properties of Lead-free Piezoelectric Thin Film on Si Wafers

著者名

T. Ohno, Y. Kamai, Y. Oda, N. Sakamoto, N. Wakiya, T. Matsuda and H. Suzuki

論文題目

Strain Engineering Effects on Electrical Properties of Lead-free Piezoelectric Thin Film on Si Wafers

雑誌名

Acta Chim. Slov.

雑誌 巻・号・項

61 453-456

発行年

2014