Strain-Induced Electrical Properties of Lead Zirconate Titanate Thin Films on a Si wafer with Controlled Oxide Electrode Structure

著者名

T. Ohno, M. Ishiduka, T. Arai, H. Yanagida, T. Matsuda, N. Sakamoto, N. Wakiya and H. Suzuki

論文題目

Strain-Induced Electrical Properties of Lead Zirconate Titanate Thin Films on a Si wafer with Controlled Oxide Electrode Structure

雑誌名

Jpn. J. Appl. Phys.

雑誌 巻・号・項

51 09LA13

発行年

2012