Stress state analysis of stress engineered BaTiO₃ thin film by LaNiO₃ bottom electrode

著者名

K, Murakoshi, K. Fukamachi, N. Sakamoto, T. Ohno, T. Kiguchi, T. Matsuda, T. Konno, N. Wakiya and H. Suzuki

論文題目

Stress state analysis of stress engineered BaTiO₃ thin film by LaNiO₃ bottom electrode

雑誌名

J. Ceram. Soc. Jpn.

雑誌 巻・号・項

121 273-277

発行年

2013