Thickness Dependence of Residual Stress in Alkoxide-Derived PZT30 Thin Film by Chemical Solution Deposition

著者名

T. Ohno, T. Matsuda, K. Isahikawa and H. Suzuki

論文題目

Thickness Dependence of Residual Stress in Alkoxide-Derived PZT30 Thin Film by Chemical Solution Deposition

雑誌名

Jpn. J. Appl. Phys.

雑誌 巻・号・項

45, pp.7265-7269

発行年

2006