Equipment
RF magnetron sputtering system
In addition to oxide and nitride films, hydroxide films can be deposited at low temperatures and in a water vapor atmosphere. New electrochromic materials are being developed using this equipment. There are four other sputtering machines in the laboratory.

Sputtering equipment
Vacuum Evaporation Equipment
We use a total of four vacuum evaporation systems, including those for metals and organic materials. We are developing ultra-thin metal films, organic EL devices, and new multilayer transparent conductive films.

Vacuum Evaporation Equipment
Fourier transform infrared spectrophotometer (FT-IR)
Quantitative analysis of water molecules and other substances in the membrane. By performing measurements under a nitrogen atmosphere, the influence of water vapor in the atmosphere can be suppressed. In addition, we own other equipment for evaluating optical properties, such as visible and ultraviolet spectrophotometers, reflectance measurement devices, ellipsometers, visible and near-infrared spectrophotometers, and luminance meters.

FT/IR-6100(JASCO)
Atomic force microscope (AFM)
It is used in almost all research topics to observe the surface morphology of various thin films.

Atomic Force Microscope AFM5100N (HITACHI)
AFM5100N(HITACHI)
Picosecond time-resolved PL measurement system
It was moved to Kitami Institute of Technology and started to use in FY2019. It can measure the time variation of light emission from light-emitting materials in the time range of picoseconds (one trillionth of a second) to nanoseconds (one billionth of a second), enabling real-time observation of energy and electron motion in the material. The light source is a Ti:sapphire laser with a time width of about 100 femtoseconds, which is time-resolved and wavelength-resolved using a combination of a streak camera and a spectrometer after the material is illuminated by a camera flash that shines for, say, 10 trillionths of a second.

Femtosecond Ti:sapphire laser
Tsunami(Spectra-Physics)

Picosecond-resolved streak camera
C4334 (Hamamatsu Photonics)
OLED Characteristic Evaluation System
We use a combination of a color luminance meter and a DC power supply to measure the current-voltage-luminance characteristic, which is essential for evaluating the performance of OLED elements. The color luminance meter can also be used to evaluate the color coordinates of the luminescence. EL spectra are sampled by optical fiber and measured using a modular compact spectrometer.

Color Luminance Meter
CS-200(Konica Minolta)

Regulated DC power supply
E3631A(Hewlett Packard)
In addition, we also own contact angle measuring equipment, four probe method measuring equipment, step meter, electrochemical measuring equipment, glove box, solar cell evaluation system, etc.
Instrumental Analysis Center
In addition, we also use the following equipment at the Instrumental Analysis Center in the same building for research as needed.
- X-ray diffractometer
- X-ray Fluorescence Analyzer
- Scanning Electron Microscope (SEM, FE-SEM)
- Digital Microscope