Preparation and Characterization of Alkoxide Derived Lead-Free Piezoelectric Barium Zirconate Titanate Thin Films with Different Compositions
Jpn. J. Appl. Phys. 2010
49 09MA11
T. Ohno, K. Uchida, N. Sakamoto, D. S. Fu, N. Wakiya, T. Matsuda, and H. Suzuki