Stress Engineering of Lead Free Ferroelectric Thin Films
47th International Conference on Microelectronics , Devices and Materials with the Workshop on Organic Semiconductors, Technologies and Devices 2011
2011, Sep. 28-30
T. Ohno, K. Fukamachi, N. Skakamoto, D. S. Fu, N. Wakiya, T. Matsuda and H. Suzuki